A multidisciplinary team of end users and suppliers has collaborated to develop a novel yet broadly enabling process for the design, fabrication, and assembly of Micro-Opto-Electro-Mechanical Systems (MOEMS). A key goal is to overcome the shortcomings of the polysilicon layer used for fabricating optical components in a conventional surface micromaching process. These shortcomings include the controllability and uniformity of material stress that is a major cause of curvature and deformation in released microstructures. The approach taken by the consortium to overcome this issue is to use the single-crystal-silicon (SCS) device layer of a Silicon-on-Insulator (SOI) wafer for the primary structural layer. Since optical flatness and mechanical reliability are of utmost importance in the realization of such devices, the use of the silicon device layer is seen as an excellent choice for devices which rely on the optical integrity of the materials used in their construction. A three-layer polysilicon process consisting of two structural layers is integrated on top of the silicon device layer. This add-on process allows for the formation of sliders, hinges, torsional springs, comb drives, and other actuating mechanisms for positioning and movement of the optical components. Flip-chip bonding techniques are also being developed for the hybrid integration of edge and surface emitting lasers on the front and back surfaces of the silicon wafer, adding to the functionality and broadly enabling nature of this process. In addition to process development, the MOEMS manufacturing consortium is extending Micro-Elecctro-Mechanical Systems (MEMS) modeling and simulation design tools into the optical domain, and using the newly developed infrastructure for fabrication of prototype micro-optical systems in the areas of industrial automation, optical switching for telecommunications, and laser printing.
Did you find this white paper useful?
27 out of 50 users found this white paper useful
Related white papers
Optical Networking and Dense Wavelength Division Multiplexing (DWDM)
This paper deals with the twin concepts of optical networking and dense wavelength division multiplexing. The paper talks about the various optical network architectures and the various components of an...
Basics of Optical Networking
Optical networks have been making “waves” recently, following the opening up of the national long distance market. We can expect a few Indian operators to install national optical networking backbones (surely,...
Deploying Data Services Over SONET/SDH
This webcast discusses how to cost-effectively provide data services over your existing SONET/SDH infrastructure, and the underlying technologies, topologies, and architectures available for you to consider. Advanced services such as...
Introduction to SONET
SONET stands for Synchronous Optical NETwork. The SONET format allows different types of formats to be transmitted on one line. SONET is a long term solution for a mid-span-meet between...
Next Generation Optical Enterprise Solutions
This webcast discusses the business benefits of Optical Enterprise solutions as well as highlighted the technical options available to enterprise customers.
SONET/SDH Optimizes DWDM Deployment
A Global 500 financial services firm faced a number of critical data storage and network infrastructure issues. The firm was generating a tremendous amount of transaction and collaborative data, creating...
Maximizing Bandwidth in CCII for Wireless Optical Applications
This paper discusses bandwidth problems associated with the usage of second-generation current conveyors in wireless optical systems, and presents a new current amplifier with wide bandwidth and large input dynamic...
